Brooks Instrument Launches New Mass Flow and Capacitance Manometer Technology at Intersolar North America 2012
HATFIELD, Pa. (July 2, 2012) – Brooks Instrument will unveil its new XacTorr CMX0 capacitance manometer, as well as the new EtherCAT capabilities of its GF40/80 mass flow controller at Intersolar North America, July 10-12 in San Francisco. Brooks will showcase these and other mass flow, pressure and vacuum products for the solar and semiconductor industries at Booth 5648.
The Brooks XacTorr CMX family of capacitance manometers provides solar and semiconductor manufacturers with highly stable and repeatable measurements for pressure sensitive processes. The product offers full-scale ranges from 1,000 Torr to 100 mTorr, as well as 0.15% of reading accuracy. With its patented Mark IV sensor the Brooks XacTorr lasts up to three times as long in aggressive processes compared to other capacitance manometers. The rapid recovery feature allows the sensor to recover from large changes in pressure faster than other vacuum gauges on the market, significantly decreasing downtime.
The XacTorr CMX0 offers users an unheated option with the same full-scale ranges and an accuracy of 0.25% of reading.
It also allows drop-in replacement and unique diagnostic features for preventative maintenance such as tracking remaining zero adjustment range to allow scheduled maintenance, which reduces unplanned interruptions. Additionally, XacTorr CMX0’s digital communication protocol monitors and troubleshoots problems without interfering with the tool
communication system.
The GF40/80 is a highly modular, user-programmable mass flow controller designed for solar and thin-film processes. Using MultiFlo™ technology, the GF40/80 combines exceptional flow repeatability, sub 1/sec flow control response time, the most comprehensive gas and flow range programmability and industry leading long-term reliability.
The GF40/80 is now equipped with EtherCAT, a new communication protocol that has been adopted by leading-edge manufacturers in the solar and microelectronics industries. The EtherCAT protocol makes it easier to network flow control and other devices for advanced process control and diagnostic capabilities.
To request more information or to schedule an interview with a Brooks representative at Intersolar North America 2012, contact Christine Batycki at Christine.Batycki@BrooksInstrument.com or (215) 362-3527 (215) 362-3527.
About Brooks Instrument
Brooks Instrument, LLC, based in Pennsylvania, is a company of highly trained specialists whose goal is to provide flow solutions that exceed customer expectations. The Company has a proven history of innovation including the first miniaturized Coriolis mass flow controller (Quantim), the first watertight and explosion proof thermal mass flow controller (Mf Series), the first thermal mass flow controller with Foundation Fieldbus (SLA Series), and the first variable area meter with Foundation Fieldbus (MT3809 & MT3750). Today, Brooks Instrument’s portfolio includes glass and metal tube variable area meters (rotameters), thermal mass flow controllers and meters, Coriolis mass flow controllers, meters and transmitters, pressure control products, magnetic level instruments, and a variety of flow accessories. The Company also owns Key Instruments which offers precision machined acrylic flow meters, molded plastic flow meters, glass tube flow meters, electronic flow meters, and flow control valves. Brooks Instrument has manufacturing locations, sales, and service offices in the Americas, Europe, and Asia. For more information on flow solutions, products, or sales contacts please visit www.BrooksInstrument.com.
Source: http://www.brooksinstrument.com/news-a-events/2012-news-releases/426-brooks-instrument-launches-new-mass-flow-and-capacitance-manometer-technology-at-intersolar-north-america-2012-.html